Bad news : Unfortunately, the answer is yes. The MAF sensor is reading AIR FLOW which, if damaged, will have a profound affect on your AFR readings. If you have everything else buttoned up correctly, then I would say that the MAF sensor was damaged.
Harsh chemicals like Brake cleaner on the MAF sensor is a bad idea. MAF sensors are very delicate and can de damaged easily. I am even hesitant about using "MAF sensor" cleaner on mine.
Good News : After you buy a new MAF sensor from Subaru, I suspect that you will not clean it with Brake cleaner again.
Last edited by KCwagon; 03-13-2013 at 11:47 AM..